CSPP Laboratory

Sanghyun Jo

PhD program

chopark94@hanyang.ac.kr

https://orcid.org/0009-0009-0577-4789
Work Experience
Mar. 2019 - Feb. 2020 EN2CORE technology
Education
Mar. 2023 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. PhD program

Mar. 2021 - Aug. 2022 Gachon University, Seongnam, Republic of Korea, Mech. Eng. M.S.

Mar. 2013 - Aug. 2019 Dong-A University, Busan, Republic of Korea, Mech. Eng. B.S.
Technical Skills
Process plasma (CCP) simulations: CF₄ dry etch, PEALD-O₂, PEALD-N₂, PEALD-NH₃

Process plasma (ICP) simulations: HDP-SiO₂, HDP-SiN

Remote plasma cleaning: Fluorine chemistry

Plasma Kinetics-Modeling: Boltzmann equation solver, Particle-in-Cell method

Multi-scale modeling: Feature-scale Monte Carlo framework

AI / Machine Learning: Deep Neural Networks (DNN), Physics-Informed Neural Networks(PINN)
Research Interests
Plasma kinetics
Awards

Publications
Woochan Jeong

PhD program

kruel89@hanyang.ac.kr

https://orcid.org/0009-0002-1684-2387
Work Experience
Education
Sep. 2023 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. PhD program

Mar. 2018 - Aug. 2023 Hanyang University, Ansan, Republic of Korea, Mech. Eng. B.S.
Technical Skills
Process plasma (CCP) simulations: CCP–Ar/N₂, MECCP–Ar/N₂

Rarefied gas dynamics: Direct Simulation Monte Carlo (DSMC), Test Particle Monte Carlo (TPMC)

Product Design: Mechanical/product design and 3D modeling
Research Interests
Rarefied Gas Dynamics, DSMC, Vacuum Systems, Plasma, CCP, ICP
Awards

Publications
Chanyeong Jeong

Ph.D program

jchy091647@gmail.com

https://orcid.org/0009-0004-8076-105X
Work Experience
Education
Mar. 2024 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. Integratead PhD program

Mar. 2018 - Feb. 2024 Hanyang University, Ansan, Republic of Korea, Mech. Eng, B.S.
Technical Skills
Process plasma (ICP) simulations: H₂/Ar, O₂/Ar, N₂/Ar, NH₃/Ar, N₂/H₂/Ar, He/O₂, HDP-SiO₂

Process plasma (CCP) simulations: VHF SiH₄/O₂/Ar

Molecular dynamics : droplet dynamics on trench for cleaning

Multiscale modeling : Feature scale -2D plasma - 3D reactor coupling
Research Interests
Multiscale Simulation
Awards
산학프로젝트 챌린지 장려상
Publications
Chengfeng Li

PhD program

chengfengli990@gmail.com
Work Experience
Education
Mar. 2024 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. PhD program

Mar. 2022 - Feb. 2024 Hanyang University, Seoul, Republic of Korea, Mech. Eng. M.S.

Aug. 2019 - Feb. 2022 Hanyang University, Ansan, Republic of Korea, Mech. Eng. B.S.

Aug. 2017 - Jul. 2019 Qingdao University of Science and Technology, Qingdao, China, Mech. Eng. B.S.
Technical Skills
Thermo-fluid-structural multiphysics coupling

Composite structural simulation & optimization

CFD modeling & turbulence analysis

Advanced simulation tools (ANSYS Fluent, Static Structural, ACP, COMSOL)
Research Interests
CFD simulation
Awards

Publications
JeongHoon Son

PhD program

json3745@hanyang.ac.kr, jhson@kwtsolution.com
Work Experience
Jan. 2025 - Present AE R&D Center, KWT Solution, Senior Research Engineer (책임연구원)

Jan. 2024 - Dec. 2024 AE R&D Center, KWT Solution, Research Engineer (선임연구원)

Jan. 2022 - Dec. 2023 AE R&D Center, KW Tech, Research Engineer (선임연구원)

Sep. 2019 - Dec. 2021 AE R&D Center, KW Tech, Associate Research Engineer (대리)

Nov. 2016 - Jul. 2019 Plasma Source Group, New Power Plasma, Assistant Manager (주임)
Education
Sep. 2024 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. Ph.D. course student

Sep. 2013 - Feb. 2016 Seoul National University, Seoul, Republic of Korea, Nuclear Eng. M.S.

Mar. 2007 - Aug. 2013 Seoul National University, Seoul, Republic of Korea, Nuclear Eng. B.S.
Technical Skills
Remote Plasma Source development / diagnostic

CCP / ICP Simulations with VizGlow (Fluid-Based Plasma Modeling Software)

Education for Plasma Equipment
Research Interests
Plasma Simulation 해석방법론 / Chemistry DB
Awards
Publications
반도체 및 평판 디스플레이 산업에서의 진공 챔버 건식 세정을 위한 원격 플라즈마 생성 장치 (Proceeding, 전력전자학술대회 논문집, 2017.07.)
Jeonghwan Sin

PhD program

y07301106@hanyang.ac.kr
Work Experience
Education
Mar. 2025 - Present Hanyang University, Seoul, Republic of Korea, Mech Eng, PhD program

Mar. 2019 - Feb. 2024 Hanyang University, Ansan, Republic of Korea, Mech. Eng. B.S.
Technical Skills
Showerhead Modeling

Process plasma (CCP) simulations: Ar, Ar/N2

VOF Simulation : Droplet dynamics on substrate for cleaning

AI / Machine Learning: Deep Neural Networks (DNN), Physics-Informed Neural Networks(PINN)
Research Interests
Multi-physics simulation
Awards

Publications
Seungmin Joo

MS program

smjoo1998@hanyang.ac.kr
Work Experience
Jun. 2024 - Feb. 2025 KumhoTire, Industrialization Technology Team2, Researcher
Education
Mar. 2025 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. M.S. course.

Mar. 2017 - Aug. 2023 Hanyang University, Ansan, Republic of Korea, Mech. Eng. B.S.
Technical Skills
Molecular Dynamics : O radical Surface Reaction, Hydrocarbon Sticking Coefficient

Process plasma (CCP) simulations: CH4
Research Interests
Multiscale simulation, Surface reaction mechanism
Awards

Publications
Muqiao ZHANG

PhD program

b13573419523@hanyang.ac.kr
Work Experience
Education
Mar. 2026 - Present Hanyang University, Seoul, Republic of Korea, Mech. Eng. PhD program.

Aug. 2023 - Aug. 2025 Hanyang University, Seoul, Republic of Korea, Mech. Eng. M.S.

Aug. 2020 - Aug. 2022 Hanyang University, Ansan, Republic of Korea, Mech. Eng. B.S

Aug. 2018 - Aug. 2022 Qingdao University of Science and Technology, China , Mech. Eng. B.S.
Technical Skills
Computaional fluid dynamics: Discrete particle model (DPM) , Ansys rocky erosion prediction

Multi-scale modeling: Feature-scale Monte Carlo framework
Research Interests
Microchannel heat transfer, elbow erosion
Awards

Publications
Jaehwan Lee

Research Intern

yeedj123@hanyang.ac.kr
Work Experience
Education
Mar. 2020 - Present Hanyang University, Ansan, Republic of Korea, Mech. Eng & Mat. Science and Chem. Eng. B.S.

Jan. 2025 - May. 2025 Exchange Student, Stony Brook Univ., The State University of New York
Technical Skills
Process plasma (ICP) simulations: Ar/NF₃, Ar/O₂, N₂

Process plasma (CCP) simulations: Ar/SiH₄
Research Interests
PEALD, 0D Analysis
Awards
2025 Academic Excellence Award, Hanyang University ERICA (2024)

2024 Academic Excellence Award, Hanyang University ERICA (2024)

Hanyang Peer Tutoring Encouragement Award (2024)
Publications

Members

Members

Current