CSPP Laboratory

Chengfeng Li

PhD program
Work Experience
Education
Mar. 2024 ~ Present Hanyang University, Republic of Korea, Mech. Eng. PhD program

Mar. 2022 ~ Hanyang University, Republic of Korea, Mech. Eng. M.S.

Aug. 2019 ~ Hanyang University, Republic of Korea, Mech. Eng. B.S.

Aug. 2017 ~ Qingdao University of Science and Technology, Qingdao, China, Mech. Eng. B.S.
Technical Skills
Thermo-fluid-structural multiphysics coupling

Composite structural simulation & optimization

CFD modeling & turbulence analysis

Advanced simulation tools (ANSYS Fluent, Static Structural, ACP, COMSOL)
Research Interests

Awards

Publications
Woochan Jeong

PhD program

https://orcid.org/0009-0009-1244-4789
Work Experience
2019 ~ 2020 EN2CORE technology
Education
Mar. 2024 ~ Present Hanyang University, Republic of Korea, Mech Eng, PhD program

Feb. 2024 Hanyang University, Republic of Korea, Mech. Eng. B.S.
Technical Skills
Process plasma (ICP) simulations: H2/Ar, O2/Ar, N2/Ar,NH3/Ar, N2/H2/Ar, He/O2, HDP-SiO2

Process plasma (CCP) simulations: VHF SiH4/O2/Ar

Molecular dynamics : droplet dynamics on trench for cleaning

Multiscale modeling : Feature scale - 2D plasma – 3D reactor coupling
Research Interests

Awards

Publications
Sanghyun Jo

PhD program

abc@hanyang.ac.kr

https://orcid.org/0009-0009-0577-4789
Work Experience
2019 ~ 2020 EN2CORE technology
Education
Mar. 2023 ~ Present Hanyang University, Republic of Korea, Mech. Eng. PhD program

Mar. 2021 ~ Aug. 2022 Gachon University, Seongnam, Republic of Korea, Mech. Eng. M.S.

Mar. 2013 ~ Aug. 2019 Dong-A University, Busan, Republic of Korea, Mech. Eng. B.S.
Technical Skills
Process plasma (CCP) simulations: CF4 dry etch, PEALD-O2, PEALD-N2, PEALD-NH3

Process plasma (ICP) simulations: HDP-SiO2, HDP-SiN

Remote plasma cleaning: Fluorine chemistry

Plasma Kinetics-Modeling: Boltzmann equation solver, Particle-in-Cell method

Multi-scale modeling: Feature-scale Monte Carlo framework

AI / Machine Learning: Deep Neural Networks (DNN), Physics-Informed Neural Networks(PINN)
Research Interests
PEALD (Plasma Enhanced Atomic Layer Deposition)

0D Plasma Analysis

Impedance Matching of process plasma (CCP) systems
Awards

Publications

Members

Members

Current