Professor

Committing the future of advanced manufacturing

Professor

TOP

Professor

교수님 프로필사진

Ho Jun Kim

Professor
한양대학교 기계공학과

Research Works

  • 09. 2022 ~Hanyang University, Mechanical Engineering, Professor
  • 03. 2020 ~ 08. 2022Gachon University, Mechanical Engineering, Assistant Professor
  • 03. 2018 ~ 02. 2020Dong-A University, Mechanical Engineering, Assistant Professor

Field works

  • 2020 ~ 2022Tes, Visiting Professor
  • 2019 ~ 2020SK Hynix, Visiting Professor
  • 2014 ~ 2018Memory Thin Film Technology Team, Samsung Electronics, Principal Engineer
  • 2008 ~ 2014Memory Thin Film Technology Team, Samsung Electronics, Senior Engineer

Education

  • May 2008 Texas A&M University, College Station, Texas, United States, Mech. Eng. Ph.D.
  • Aug. 2004 Texas A&M University, College Station, Texas, United States, Mech. Eng. M.S.
  • Aug. 2002 Hanyang University, Seoul, Republic of Korea, Mech. Eng. B.S.

Awards

  • The 3rd J&L Tech Academic Award from the Korean Vacuum Society
  • Samsung Best Paper Award 2013 (Bronze Award in Base Technology)
  • Multiple conference paper distinctions (e.g., KISM)

Technical Skills

  • Process plasma (CCP) simulations: PE-TEOS, PE-SiN, ACL, PEALD-TiO2, PEALD-SiO2, PEALD-SiN, CF4-Ar dry etch, PEALD-O2/Ar, PEALD-N2/Ar
  • Process plasma (ICP) simulations: HDP-SiO2, HDP-SiN
  • Thermal chemical vapor deposition: DCS-WSix, CVD-TiN
  • Particle transport: contamination analysis, inertial particle modeling
  • Remote plasma cleaning: Fluorine chemistry
  • Surface modeling: molecular dynamics, ab initio calculation, computational chemistry